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    • 先锋具备从机械加工到表面处理全制程自主生产能力和丰富经验,拥有千级和百级洁净间,可按客户需求,为国内外半导体设备厂商提供零部件表面处理、清洗以及翻新全制程服务。

      客户有上海中微、北方华创、沈阳拓荆、中芯国际、捷尼克、上海微电子等半导体设备企业。

      产品涉及刻蚀机、MOCVD、ICP、加热器等零部件。


      SPT possesses comprehensive capabilities and extensive application experience throughout the entire product implementation, from machining, surface treatment to assembly and testing. SPT has been equipped with thousand/hundred grade clean room, and able to provide cleaning, surface treatment and refurbishment services with customized manufacturing process.

      Our customers include AMEC, NAURA, PIOTECH, SMIC, Genic, SMEE etc., and representative products are critical components such as chambers, liners, in-chamber cooling and heating parts for etching machine, MOCVD, ICP and other industrial application.





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